Abstract：Based on the strain gradient elasticity theory and Hamilton principle, a size-dependent model including Casimir force for the electrostatically actuated Nano-Electro-Mechanical Systems(NEMS) is presented, and the governing equation and boundary conditions are derived. The problem is solved numerically with the help of generalized differential quadrature method and pesudo-arclength algorithm. The results reveal that Casimir force can reduce the pull-in voltage of system. And once scale of system reach to the critical value (the gap between two electrodes is less than minimum gap, or the length of movable beam is larger than the detachment length), the pull-in instability would occur without voltage applied. The study may be helpful for the design and theoretical modeling of NEMS incorporating Casimir force.
2016, Vol. 37 
