Abstract：Recently, the photothermal methods are widely used as a detection way in micro-electromechanical system (MEMS) and nano-electromechanical system (NEMS), especially in situations where other techniques are not useful. The plasma wave and thermal wave, generated by the absorbed intensity-modulated optical excitation, play the dominant role in the PT experiments for most semiconducting and microelectronics structures. So, the study of photothermal response of a sample under different excitation was very important. In this paper green function method was used to solve 3-dimensional coupled plasma wave and heat conduction equations. The expressions of carrier density and temperature were derived analytically and the space distribution were given graphically for different heat sources.
2014, Vol. 35 
