摘要材料纳米尺度的各种性能中，纳米力学性能是纳米材料和器件服役所需要保证的最基本性能。因此，发展可靠的定量化纳米力学测试技术就显得尤为关键。原子力显微镜(Atomic Force Microscope，AFM)作为纳米力学测试的重要平台，目前广泛应用于材料纳米尺度形貌和力学性能成像。作为原子力显微术的前沿应用模式之一，多模态原子力显微术通过同时激励探针的两个或多个振动模态对样品进行测试或成像，可实现对被测样品高分辨率、高灵敏度、定量化和无损的纳米力学快速成像及检测，具有极其广泛的应用前景。围绕多模态原子力显微术，首先介绍了多模态原子力显微术的基本成像原理和力学模型基础。随后，综述了多模态原子力显微术探针动力学以及成像技术相关研究的主要进展。然后，对多模态原子力显微术的几类典型应用进行了总结和评述。最后，对多模态原子力显微术未来可能的研究方向进行了展望。
Abstract：Among the various properties of materials at the nanoscale, nanomechanical properties are the basic properties that need to be ensured for nanoscale materials and devices. Therefore, the development of reliable and quantitative mechanical property measurement methods at the nanoscale is of great significance. Atomic Force Microscope (AFM), as an important platform for nanoscale mechanical measurements, is widely used in micro/nanoscale topography and mechanical properties imaging. By simultaneously exciting two or more vibrational modes of the cantilever, multimodal AFM can achieve high resolution, high sensitivity, quantitative, non-destructive, and rapid nanomechanical imaging, which has a promising prospect. Focusing on multimodal AFM, the basic principles of multimodal AFM are first introduced. Subsequently, the main advances in the study of cantilever dynamics and imaging techniques in multimodal AFM are reviewed. Then, typical applications of multimodal AFM are summarized and discussed. Finally, the possible future research topics of multimodal AFM are prospected.
2022, Vol. 43 
