Abstract：A microstructure-dependent large deformation electrodynamic model of MEMS devices with the initial configurations is established in an arc coordinate system based on the large deformation theory of the curved beam. The differential quadrature method (DQM) is applied to discretize the nonlinear mathematical model in the special domain. Afterwards, a set of the first order nonlinear differential & algebra system equations can be derived. The Petzold-Gear BDF method is used to solve the first order nonlinear differential & algebra system equations in the temporal domain. The transient micro-electromechanical behaviors, including snap-through and pull-in, of the MEMS switches under the electric force are studied in detail, and compares the obtained results with the existing experiment.
2013, Vol. 34 
