Abstract:Rapid development in manufacturing and processing technologies is bringing forward tougher and tougher requirements for tool and mould materials, such as super-hardness, high heat-resistance, excellent anti-wear capability, high strength and toughness, and long life. Hard ceramic thin film coatings (HCTFCs), as a kind of promising materials that may satisfy the above requirements, have been receiving increasing attention. Experiment, simulation and theoretical analysis are the main means to study the mechanical properties of HCTFCs, which can reveal the mechanical properties, hardening mechanism and dominant influencing factors. In this article, the progresses in the study of mechanical properties of HCTFCs are reviewed, including the preparation of various HCTFCs, experimental and theoretical analyses of the mechanical properties of HCTFCs as well as the possible influencing factors, potential hardening mechanisms of super-hard ceramic thin film coatings, theoretical models and analytical methods, etc.