Abstract： The nonlinear governing equation of micro beams is transfered into the linear differential equation by assuming the initial function. Barycentric rational interpolation collocation method is applied to solve linear differential equation .Barycentric rational interpolation iteration collocation method (BRIICM) as a numerical analysis method is presented to solve nonlinear bending problem of MEMS micro beams. The direct linearization formulations and the Newton linearization formulatons of nonlinear differential equation are given. The calculation method and formulation of nonlinear integral item are discussed in detail. The matrix-vector calculation formula of barycentric rational interpolation iteration collocation method is constructed by using barycentric rational interpolation differentiation matrix. Numerical examples demonstrate that the presented method for solving nonlinear bending problem of MEMS micro beams has merits of simple calculation formulations, convenient program and high calculation precision.
2015, Vol. 36 
