Abstract：To build the reduced order model(ROM) of an electrostatically actuated micro-plate device,a system identification method is proposed. The strain energy and capacitance of the nonlinear system are written as multivariate polynomial functions of the structural modal amplitudes. The unknown coefficients of these polynomials are then computed using ther strain energy data and capacitance data which calculated from a set of steady state,high-order, nonlinear finite element models. The resulting strain energy and capacitance expressions can be used to develop the ROM of the device. The simulation with the ROM has a much lower computational cost. The caulculating results campare well with those from a high-fidelity finite element model, thus this modeling approach is validated.
2010, Vol. 31 
