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| PHOTOTHERMAL RESPONSE IN SEMICONDUCTING MICROSTRUCTURE PRODUCED BY LASER EXCITATION |
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Abstract Recently, the photothermal methods are widely used as a detection way in micro-electromechanical system (MEMS) and nano-electromechanical system (NEMS), especially in situations where other techniques are not useful. The plasma wave and thermal wave, generated by the absorbed intensity-modulated optical excitation, play the dominant role in the PT experiments for most semiconducting and microelectronics structures. So, the study of photothermal response of a sample under different excitation was very important. In this paper green function method was used to solve 3-dimensional coupled plasma wave and heat conduction equations. The expressions of carrier density and temperature were derived analytically and the space distribution were given graphically for different heat sources.
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Received: 02 August 2013
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2014, Vol. 35 
