Abstract Among the various properties of materials at the nanoscale, nanomechanical properties are the basic properties that need to be ensured for nanoscale materials and devices. Therefore, the development of reliable and quantitative mechanical property measurement methods at the nanoscale is of great significance. Atomic Force Microscope (AFM), as an important platform for nanoscale mechanical measurements, is widely used in micro/nanoscale topography and mechanical properties imaging. By simultaneously exciting two or more vibrational modes of the cantilever, multimodal AFM can achieve high resolution, high sensitivity, quantitative, non-destructive, and rapid nanomechanical imaging, which has a promising prospect. Focusing on multimodal AFM, the basic principles of multimodal AFM are first introduced. Subsequently, the main advances in the study of cantilever dynamics and imaging techniques in multimodal AFM are reviewed. Then, typical applications of multimodal AFM are summarized and discussed. Finally, the possible future research topics of multimodal AFM are prospected.
2022, Vol. 43 
