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Abstract Microscopic high-throughput mechanical characterization technology serves as a pivotal approach for revealing the structure–property relationship of materials. This article systematically reviews the fundamentals, recent advances, and future trends in microscopic high-throughput mechanical characterization methods, with a focus on scanning probe microscopy and nanoindentation. The imaging size, scanning speed, and information dimensionality of scanning probe microscopy can be significantly enhanced through the development of parallel probe arrays, high-speed scanning technique, and multi-mode integrated systems. For nanoindentation, the development of high-speed mapping has enabled efficient acquisition and quantitative analysis of various mechanical properties, including hardness, elastic modulus, and fracture toughness. Furthermore, this article focuses on the vital role of data-driven approaches such as machine learning in empowering the aforementioned technologies, including efficient processing of massive data, enhancement of low-quality images, and optimization of experimental processes, significantly improving the characterization efficiency and accuracy. Finally, this article looks forward to the prospects of microscopic high-throughput mechanical characterization technology towards higher throughput and advanced intelligence.
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Received: 15 December 2025
Published: 30 August 2026
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| Fund:National Natural Science Foundation of China;National Natural Science Foundation of China |
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2026, Vol. 47 
